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高掺锡二氧化硅玻璃薄膜的制作及折射率测量
引用本文:王铿,贾宏志,姜博实,夏桂珍. 高掺锡二氧化硅玻璃薄膜的制作及折射率测量[J]. 激光杂志, 2009, 30(1)
作者姓名:王铿  贾宏志  姜博实  夏桂珍
作者单位:上海理工大学光学与电子信息工程学院,上海,200093;武警上海政治学院实验室管理中心,上海,200435
基金项目:国家自然科学基金,上海市重点学科建设项目 
摘    要:最近研究发现掺锡的二氧化硅玻璃薄膜具有很强的光敏性,但采用化学气相沉积法制作的掺锡二氧化硅玻璃薄膜其锡含量都不高.本文报道了采用溶胶-凝胶法制作高掺锡二氧化硅薄膜(二氧化锡含量分别为75%mol和66%mol)的实验结果.并用透射光谱法测试了薄膜的折射率,测试结果表明薄膜折射率随波长的增加而减小,随着二氧化锡含量的增加而增加.

关 键 词:溶胶-凝胶  掺锡二氧化硅玻璃薄膜  透射光谱法

The fabrication of the high Sn-doped silica film and the measurement of its refractive index
WANG Keng,JIA Hong-zhi,JIANG Bo-shi,XIA Gui-zhen. The fabrication of the high Sn-doped silica film and the measurement of its refractive index[J]. Laser Journal, 2009, 30(1)
Authors:WANG Keng  JIA Hong-zhi  JIANG Bo-shi  XIA Gui-zhen
Affiliation:1.Optical & Electronic Information Engineering College;University of Shanghai for Science and Technology;Shanghai 200093;China;2.Political Institute of Shanghai Armed Police;Shanghai 200435;China
Abstract:The latest study shows a high photosensitive in Sn-doped silica thin films,but the content index of Sn in Tin-doped silica is not very high by the method of Chemical Vapor Deposition(CVD).This text reports a result of the Tin-doped silica thin films which is produced by the sol-gel(the content index of SnO2 is 75% and 66%mol).Then the method of the transmission spectrum is brought to get the refractive index of the thin films.The test manifests that the refractive index decrease as the increase of the wavel...
Keywords:sol-gel  tin-doped silica film  transmission spectrum  
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