Modeling and simulation of a silicon beam resonator attached to a square diaphragm

Based on the Finite Element Method (FEM) model of a practical silicon beam resonator attached to a square diaphragm used for measuring pressure, this paper presents two location error models which exist in actual fabrication. We calculate, analyze and investigate the relationship between the basic natural frequency of the beam resonator and the measured pressure for two error models by making use of FEM. In order to improve the exchangeability of the sensor, it is necessary to monitor the processing accuracy inx-andy-axes, and the reference angle relative to the ideal location within the positive stress range. It is also necessary to monitor the processing accuracy in thex-axis within the negative stress range, as the beam axial direction is along thex-asis the square diaphragm.