| 氧化温度对TiAlN薄膜成分的影响 |
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| 引用本文： | 霍红英,邹敏,张勇. 氧化温度对TiAlN薄膜成分的影响[J]. 表面技术, 2011, 0(5): 48-50 |
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| 作者姓名： | 霍红英 邹敏 张勇 |
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| 作者单位： | 1. 攀枝花学院,攀枝花,617000
2. 成都东泰工业有限公司,成都,610100 |
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| 摘 要： | 采用磁控溅射方法在硬质合金表面沉积TiAlN硬质薄膜,并在400～850℃的温度下进行氧化处理,通过XPS分析氧化后薄膜表面层的物质组成及变化.结果表明:氧化后的薄膜表面层存在AlN,TiN,Al2O3,TiO2和N-O;随着氧化温度的升高,氧元素和铝元素增加,氮元素和钛元素减少,最终在薄膜表面形成一层耐高温的Al2O...
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| 关 键 词： | TiAlN薄膜 氧化处理 成分分析 |
The Effect of Oxidation Temperature on the Composition of TiAlN Coatings |
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| HUO Hong-ying,ZOU Min,ZHANG Yong. The Effect of Oxidation Temperature on the Composition of TiAlN Coatings[J]. Surface Technology, 2011, 0(5): 48-50 |
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| Authors: | HUO Hong-ying ZOU Min ZHANG Yong |
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| Affiliation: | HUO Hong-ying1,ZOU Min1,ZHANG Yong2(1.Panzhihua University,Panzhihua 617000,China,2.Dong-tai Corporation,Chengdu 610100,China) |
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| Abstract: | The experiment deposited TiAlN coatings on top of the cemented carbides first and then took these samples oxidized from 400 ℃ to 850 ℃ for half an hour.The aim is to analysis how the composition changes while the oxidizing temperature rises via XPS method.Experimental result shows that on the face of oxidized TiAlN coatings are comprised of AlN,TiN,Al2O3,TiO2 and N—O chemical bond.With the rise of the oxidizing temperature,the element of nitrogen and titanium reduce while the oxygen and the aluminum increase.Finally a protective layer of Al2O3 on the face of TiAlN coatings is generated. |
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| Keywords: | TiAlN coatings oxidation treatment component analysis |
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