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Directed Self‐Assembly with Sub‐100 Degrees Celsius Processing Temperature,Sub‐10 Nanometer Resolution,and Sub‐1 Minute Assembly Time |
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| Authors: | Woon Ik Park Kyungho Kim Hyun‐Ik Jang Jae Won Jeong Jong Min Kim Jaesuk Choi Jae Hong Park Yeon Sik Jung |
| Affiliation: | 1. Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak‐ro, Yuseong‐gu, Daejeon 305‐701, Republic of Korea;2. Division of Nano‐Convergence Technology, Korea National NanoFab Center, Deajeon 305‐806, Republic of Korea;3. Department of Materials Science and Engineering, University of Seoul, Seoul 130‐743, Republic of Korea |
| Abstract: | |
| Keywords: | block copolymers lithography rapid assembly self‐assembly |