Sem calibration in the micrometer and submicrometer ranges by means of a periodic linear measure

A periodic linear measure is described for use in scanning electron microscopes, which has eight values for line width in the micrometer and submicrometer ranges. Methods have been developed for calibrating the SEM with such a measure, which are not sensitive to errors in beam focusing. Translated from Izmeritel'naya Tekhnika, No. 4, pp. 48–52, April, 2000.