Integrated design of the feedback controller and topography estimator for atomic force microscopy |
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| Authors: | S Kuiper PMJ Van den Hof G Schitter |
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| Affiliation: | 1. TNO Technical Sciences, Stieltjesweg 1, 2628 CK Delft, The Netherlands;2. Delft Center for Systems and Control Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands;3. Control Systems Group, Department of Electrical Engineering, University of Technology Eindhoven, Den Dolech 2, 5612 AZ Eindhoven, The Netherlands;4. Automation and Control Institute, Vienna University of Technology, Gusshausstrasse 27–29, 1040 Vienna, Austria |
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| Abstract: | In atomic force microscopy (AFM) the force between the measurement tip and the sample is controlled in a feedback loop to prevent damage of the tip and sample during imaging, and to convert the measurement of the tip–sample force into an estimate of the sample topography. Dynamical uncertainties of the system limit the achievable control bandwidth and the accuracy of the topography estimation. This paper presents an integrated approach to design a feedback controller and topography estimator, taking into account the dynamical uncertainties of the system. The proposed methodology is experimentally demonstrated on a commercial AFM system, showing a direct trade-off between the control bandwidth and the accuracy of the topography estimation. |
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| Keywords: | Atomic force microscopy Model-based control Robust control Topography estimation Optimal filter design |
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