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纳米TiO_2薄膜的制备及其光谱特性研究
引用本文:郝丽媛,周炳卿,韩兵,陈霞,李力猛,那日苏,王丽娟. 纳米TiO_2薄膜的制备及其光谱特性研究[J]. 信息记录材料, 2009, 10(5): 17-22
作者姓名:郝丽媛  周炳卿  韩兵  陈霞  李力猛  那日苏  王丽娟
作者单位:内蒙古师范大学,物理与电子信息学院,功能材料物理与化学自治区重点实验室,呼和浩特,010022
摘    要:采用溶胶凝胶法和旋转涂膜工艺,以普通玻璃为衬底,制备均匀、透明的TiO2纳米薄膜。利用X射线衍射仪(XRD)、原子力显微镜(AFM)和紫外可见光谱(UV/vis)对TiO2进行表征。通过500℃、600℃、700℃、800℃和900℃恒温烧结2h后XRD测试表明:经500°C退火得到TiO2粉末为锐钛矿晶相,800℃转化为金红石相结构,900℃出现了金红石相与板钛矿相的混合晶相。通过AFM观测,薄膜的平均粗糙度为1.71nm。通过紫外可见光谱分析,探讨了影响TiO2纳米膜厚度和禁带宽度度的各种因素。结果表明:涂膜次数、热处理温度等将直接影响二氧化钛薄膜的紫外可见光谱和禁带宽度。

关 键 词:TiO2纳米膜  溶胶凝胶法  XRD  紫外可见光谱

Preparation of Nanocrystalline TiO_2 Thin Film and Study of Its Spectral Ability
HAO Li-yuan,ZHOU Bing-qing,CHEN Xia,HAN Bing,LI Li-meng,NA Ri-su,WANG Li-juan. Preparation of Nanocrystalline TiO_2 Thin Film and Study of Its Spectral Ability[J]. Information Recording Materials, 2009, 10(5): 17-22
Authors:HAO Li-yuan  ZHOU Bing-qing  CHEN Xia  HAN Bing  LI Li-meng  NA Ri-su  WANG Li-juan
Affiliation:HAO Li-yuan,ZHOU Bing-qing,CHEN Xia,HAN Bing,LI Li-meng,NA Ri-su,WANG Li-juan(College of Physics , Electron Information of Inner Mongolia Normal University Key Lab of Physics , Chemistry for Functional Material,Huhhot 010022,China)
Abstract:The uniform transparent nanocrystalline TiO2 thin films were prepared on glass substrate by sol-gel method. The nanostructure TiO2 were characterized by XRD,AFM and UV-VIS spectra. The Structure of TiO2 powders was investigated by X-ray diffraction after heating treatment in 500°C、600℃、700℃、800℃ and 900℃. The results show that the crystalline phase is anatase in 500°C 、rutile in 800℃ and the composite phase structure of rutile and Brookit in 900℃. the films roughness average is 1.71 nm by AFM.The thickness and the bandgap of nanocrystalline TiO2 thin films were calculated by using the UV-Vis spectra.The results show that aging time,heat treatment and dip coating times would affect the UV-Vis spectra and the bandgap of TiO2 thin films.
Keywords:XRD
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