| Affiliation: | 1. Ecole Polytechnique Fédérale de Lausanne, EPFL-SB-ISIC-GPAO, Station 6, CH-1015, Lausanne, Switzerland;2. Sheffield Hallam Univ, Howard St, Sheffield, S1 1WB, UK;3. Fraunhofer-Institute for Surface Engineering and Thin Films (IST), Bienroder Weg 54E, 38108 Braunschweig, Germany;4. Ecole Polytechnique Fédérale de Lausanne, EPFL-SB-ISIC-LPI, Bat Chimie, Station 6, CH1015, Lausanne, Switzerland;3. State Key Laboratory of Physical Chemistry of Surfaces, Jiangyou, Sichuan, 621700, China;1. AMO GmbH, AMICA, Otto-Blumenthal-Straße 25, D-52074 Aachen, Germany;2. micro resist technology GmbH, Köpenicker Str. 325, 12555 Berlin, Germany |
