| 半导体器件模拟技术的研究 |
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| 引用本文： | 刘恩峰,刘晓彦,韩汝琦. 半导体器件模拟技术的研究[J]. 微电子学, 2002, 32(3): 206-208,233 |
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| 作者姓名： | 刘恩峰 刘晓彦 韩汝琦 |
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| 作者单位： | 北京大学,微电子学研究所,北京,100871 |
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| 摘 要： | 主要介绍了半导体器件模拟中常用的HD模型与DD模型和三角网格划分的常用算法。以泊松方程为例，简要说明了如何在三角网络上离散化方程。同时，介绍了几种求解非线形方程组常用的数值方法。
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| 关 键 词： | 模拟技术 半导体器件 集成电路 |
| 文章编号： | 1004-3365(2002)03-0206-03 |
An Overview of Simulation Technologies for Semiconductor Devices |
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| LIU En feng,LIU Xiao yan,HAN Ru qi. An Overview of Simulation Technologies for Semiconductor Devices[J]. Microelectronics, 2002, 32(3): 206-208,233 |
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| Authors: | LIU En feng LIU Xiao yan HAN Ru qi |
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| Abstract: | Technologies for simulation of semiconductor devices are reviewed in the paper, such as physical models, algorithm of refining mesh, and numerical method With Poison equation as an example, the discretization of the equation on triangle grids is illustrated Numerical methods commonly used for solution of nonlinear equation set are also described |
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| Keywords: | TCAD Semiconductor device Device simulation HD model Triangle grid Numerical method |
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