TiO2/SiO2薄膜中的相界扩散及晶化行为研究

本文研究了溶胶一凝胶法制备TiO2／SiO2复合薄膜的晶化行为以及复合薄膜与过渡层的相界扩散采用X-ray衍射分析了50TiO2／50SiO2薄膜中TiO2的析晶特征，研究表明，随热处理温度的升高，薄膜的结构由非晶转变为在SiO2玻璃网络中析出的锐钛矿相，再到锐钛矿和金红石二相共存，最后转变为金红石相，并伴随有磷石英和方石英的析出，且其晶粒尺寸也在逐渐增大．AES分析给出了过渡层的气孔率对复合膜中Ti的扩散能力的影响以及复合膜与过渡层之间碳的分布．SEM及EDS进一步揭示了薄膜表面存在亚微米不均匀区域，在此区域中碳的含量较高．在氧气中，提高热处理温度，可以降低碳的含量.

Diffusion of Phase Boundary and Crystallization Behaviors for Tio2/SiO2 Composite Films

The crystallization behaviors of sol-gel TiO2/SiO2 composite films and the phase boundary diffusion of the film alld the buffer la3.er were studied. 50TiO2/50SiO2 films annealed between 500"C and 950'C exhibited crytsallizatioll in the anatase ad rutile phases. The structure of the thin film transformed from amorphous state into anatase, and from anatase into rutile and induced the crystallization of SiO2. For TiOZ/SiO2 film deposited on a dense silica and nano-porous SiO2 surface, the diffusion of Ti call be observed in the nano-porous layer by BES. Between the film and the bllffer layer carboll was also observed by AES. SEAl and EDS revealed the distribution of carboll in the thin film surface. With the increasing heat-treatment temperature in O2 the conent of carbon decreajsed.