离子束技术沉积羟基磷灰石薄膜的结构及溶解性能

分别采用离子束溅射和离子束增强沉积技术，以烧结羟基磷灰石（HA）陶瓷为靶材，在纯钛金属基片表面沉积HA薄膜．X光电子能谱分析表明：薄膜中Ca、P、O元素的化学态与所用HA陶瓷靶材相接近；相比HA靶材，薄膜表面存在CO₃^2-．X射线衍射分析表明：沉积薄膜均为非晶态结构，经650℃退火处理转变为结晶磷灰石．在模拟体液中的溶解实验揭示：薄膜仅与溶液中Ca、P和O存在离子交换；薄膜易降解，浸泡10天，样品经历了降解、再沉积过程；相比离子束溅射沉积膜，离子束增强沉积膜具有加速沉积Ca、P的能力．

Structure and Solubility of Hydroxyapatite Thin Films Produced by Ion Beam Technique

Hydroxyapatite (HA) thin films were deposited onto titanium substrates separately by ion beam sputtering (IBS) and ion beam enhanced deposition (IBED) methods, by using sintered pure HA ceramic as a target material. X-ray photoelectron spectroscopy (XPS) ajnalysis showedthat the chemical states of Ca, P, O elements of the deposited films were close to those of usedHA ceramic target. The existence of was also determined in the deposited films. The asdeposited films both achieved by IBS and IBED methods were amorphous, and a hydroxyapatite-type structure was achieved from the annealed films, as revealed by X-ray diffraction analysis.After immersion in the stimulated body fluid (SBF), the as-deposited films dissolved easily. XPSanalysis showed that the deposited films experienced only Ca, P and O ion exchange with theSBF, and the reprecipitation of calcium phosphate on the deposited films was determined. Incomparison with the IBS films, the formation of calcium phosphate was accelerated for the IBED films.