Vacuum-UV emitter using low-pressure discharge in helium-water vapor mixture

The spectral characteristics of emission from plasma of periodic-pulsed capacitive discharge in a mixture of water vapor with helium have been studied in a spectral range of 140–315 nm. Dependences of the intensity of the characteristic emission lines of hydroxy groups in He-H₂O plasma on the partial pressure of water vapor at a helium pressure of p(He) = 2.6 kPa are presented. The results provide a basis for the creation of simple sources of vacuum-UV radiation with a cheap working medium based on water vapor.