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SAW传感器对神经性毒剂及模拟剂的检测进展
引用本文:王华,杜晓松,蒋亚东,谢光忠,应智花,何为.SAW传感器对神经性毒剂及模拟剂的检测进展[J].传感器与微系统,2007,26(4):7-10.
作者姓名:王华  杜晓松  蒋亚东  谢光忠  应智花  何为
作者单位:1. 电子科技大学,光电信息学院,电子薄膜与集成器件国家重点实验室,四川,成都,610054
2. 电子科技大学应用化学系,四川,成都,610054
摘    要:基于压电效应和化学特异选择性的有机敏感材料的声表面波(SAW)传感器,因其具有体积小、响应时间快、选择性好、可集成度高等优点而成为对气体实时、在线检测的重要手段之一。介绍了SAW传感器在神经性毒剂及其模拟剂检测中的应用,重点从SAW传感器测试电路、敏感膜材料、成膜方法及信号处理等方面介绍此领域的研究现状,并对发展趋势进行了展望。

关 键 词:声表面波传感器  敏感膜  质量沉积效应  模式识别
文章编号:1000-9787(2007)04-0007-04
收稿时间:2006-09-18
修稿时间:2006-09-18

Progress in nerve agents and their simulants detection by SAW sensors
WANG Hua,DU Xiao-song,JIANG Ya-dong,XIE Guang-zhong,YING Zhi-hua,HE Wei.Progress in nerve agents and their simulants detection by SAW sensors[J].Transducer and Microsystem Technology,2007,26(4):7-10.
Authors:WANG Hua  DU Xiao-song  JIANG Ya-dong  XIE Guang-zhong  YING Zhi-hua  HE Wei
Affiliation:1. State Key Laboratory of Electronic Thin Film and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China; 2.Applied Chemistry Department,University of Electronic Science and Technology of China, Chengdu 610054, China
Abstract:Polymer-coated surface acoustic wave(P-SAW) sensor based on piezoelectric effect and chemical specific selection is one of the most important real-time,on-line gas detection devices with its superiorities such as small size,fast response,good selectivity and high integration.The applications of SAW sensors in detecting nerve agents and their simulants are summarized with emphasis on the SAW circuits,sensing materials,film deposition techniques and signal processing algorithm.The development trend of SAW sensors is also discussed.
Keywords:surface acoustic wave(SAW) sensor  sensing film  mass loading effect  pattern recognition
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