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微波烧结法制备ITO陶瓷
引用本文:王晓平. 微波烧结法制备ITO陶瓷[J]. 电子元件与材料, 2011, 30(6): 23-25
作者姓名:王晓平
作者单位:宁夏东方钽业股份有限公司;
摘    要:采用微波烧结,在常压、纯氧气氛条件下制备了ITO陶瓷.通过XRD、SEM和金相分析等方法研究了烧结温度和保温时间对ITO陶瓷相对密度的影响.结果表明,微波烧结具有升温速度快、保温时间短的优点,大幅缩短了ITO陶瓷的烧结周期.1550℃微波烧结并保温20 min的ITO陶瓷相对密度达到了99.5%,晶粒大小均匀,结构紧密...

关 键 词:ITO陶瓷  微波烧结  相对密度  升温速度  保温时间

Preparation of ITO ceramic by microwave sintering
WANG Xiaoping. Preparation of ITO ceramic by microwave sintering[J]. Electronic Components & Materials, 2011, 30(6): 23-25
Authors:WANG Xiaoping
Affiliation:WANG Xiaoping(Ningxia Orient Tantalum Industry Co.,Ltd,Shizuishan 753000,Ningxia Huizu Zizhiqu,China)
Abstract:ITO ceramic was produced by microwave sintering under atmospheric pressure,pure oxygen atmosphere condition.Effects of the sintering temperature and the soaking time on the relative density of ITO ceramic were studied by XRD,SEM and metaloscopy.Results show that the microwave sintering possesses quick heating rate and short soaking time,which greatly shorten the sintering cycle of ITO ceramic.The relative density of ITO ceramic reaches 99.5% obtained by microwave sintering at 1 550 ℃ for 20 min.ITO ceramic possesses uniform grain size(3–8 μm) and tight structure,without the single-phase crystal separation.
Keywords:ITO ceramic  microwave sintering  relative density  heating rate  soaking time  
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