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CaO-B2O3-SiO2系LTCC基板材料的制备及烧结
引用本文:龙承毅,张树人,周晓华,李波.CaO-B2O3-SiO2系LTCC基板材料的制备及烧结[J].电子元件与材料,2011,30(7):29-31.
作者姓名:龙承毅  张树人  周晓华  李波
作者单位:电子科技大学 电子薄膜与集成器件国家重点实验室,四川成都,610054
基金项目:国防基础科研计划资助项目
摘    要:通过高温熔融法制备的CaO-B2O3-SiO2(CBS)系玻璃粉体(A料)与固相合成法制备的CaO-B2O3-SiO2-Al2O3粉体(B料)按照质量比7∶3混合,烧结制备CBS系LTCC材料,研究不同烧结温度对材料性能的影响。结果表明:在850℃下烧结的CBS玻璃陶瓷致密性好,x=y方向收缩率为15.16%,密度为2...

关 键 词:CaO-B2O3-SiO2  LTCC  玻璃陶瓷

Preparation and sintering of CaO-B_2O_3-SiO_2 system for LTCC substrate materials
LONG Chengyi,ZHANG Shuren,ZHOU Xiaohua,LI Bo.Preparation and sintering of CaO-B_2O_3-SiO_2 system for LTCC substrate materials[J].Electronic Components & Materials,2011,30(7):29-31.
Authors:LONG Chengyi  ZHANG Shuren  ZHOU Xiaohua  LI Bo
Affiliation:LONG Chengyi,ZHANG Shuren,ZHOU Xiaohua,LI Bo(State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 610054,China)
Abstract:CaO-B2O3-SiO2(CBS) system LTCC material was synthesized by using the mixtrue of CaO-B2O3-SiO2(CBS) glass powder(A powder) prepared through high temperature melting method and CaO-B2O3-SiO2-Al2O3 powder(B powder) prepared through solid-phase method with the mass ratio of 7:3.The effects of sintering temperature on the properties of prepared LTCC materials were investigated.Results show that CBS system LTCC materials sintered at 850 ℃ show good denstified properties:shrinkage at x-y direction is 15.16%,bulk density ρ=2.642 g/cm3,εr= 5.99(1 MHz),tanδ<3.93×10-4(1 MHz) and bending strength σ = 165 MPa.The prepared LTCC materials can be used as substrate materials.
Keywords:CaO-B2O3-SiO2  LTCC  glass-ceramic  
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