硅微加速度计的建模与仿真

根据物体相对运动理论,采用能量法表述了建立硅微加速度计功能组件模型的一般方法,并以Verlog-A为模型编码语言实现了硅微加速度计参数化组件模型.利用这些参数化的功能组件模型,在Saber仿真平台上构建了电容式微加速度计系统级模型,并进行了仿真.频域仿真结果表明系统的谐振频率相对于有限元模态分析结果,计算精度相差在3%以内;时域仿真结果表明使用该系统级模型能够快速进行复杂机电耦合系统时域行为分析,输出电压仿真结果与实测值相差在7.5%以内.

Modeling and simulation of micro-silicon accelerometer

Accelerometer is decomposed into many functional components, each of which is modeled by using the relative movement theory and energy method, and its parameterized model coded in Verlog - A is realized. A system - level model of capacitive micromachined accelerometer composed of functional components models is designed and simulated in SABER. Simulation of modal frequency of the accelerometer agrees within 3% to the resuet of FEM analysis. The result also indicates that transient analysis of complicated electro -mechanical coupled system is accomplished quickly in this way. Simulation of Vout agrees to testing result of within 7.5 %.