预填充聚苯乙烯控制SiO2/ZrO2薄膜膜间渗透

提出预填充方式控制膜间渗透,采用聚苯乙烯(PS)对低折射率SiO2膜内孔隙进行预填充,镀第2层ZrO2后再于甲苯中洗脱,恢复孔隙率以实现膜间防渗透。采用椭偏仪、紫外-可见光分光光度计、原子力显微镜(AFM)和光学显微镜对薄膜进行表征,研究了预填充PS前后的溶胶-凝胶SiO2/ZrO2薄膜膜间渗透与激光辐照损伤。结果表明,单层SiO2填充PS后膜面均方根粗糙度由4.164 nm下降为1.983 nm,折射率由1.1474增加到1.358 3,在甲苯中浸泡15 min后可完全清除PS。PS填充后的SiO2/ZrO2双层膜清洗1 h后,可使填充了PS的SiO2层的平均折射率由1.36降为1.29(未填充区域为1.38),透光率峰值提高(1～2)%。利用Nd:YAG激光器(1.064μm,8.1 ns)对SiO2/ZrO2双层膜进行了损伤阈值的测试,结果表明经PS填充并清洗后损伤阈值降低了8 J/cm2,但两者损伤形貌均为熔融型。

Infiltrating control of SiO_2/ZrO_2 sol-gel films by pre-filled polystyrene

A pre-filling method is proposed to prevent infiltrating.The ZrO2 film is deposited on the pre-deposited and polystyrene(PS)-filled SiO2 film.Then the PS is washed away by dipping in toluene in order to revive the micro-holes of the SiO2 film.At the same time,the infiltrating is restricted.Ellipometry,UV-VIS spectroscopy,atomic force microscopy(AFM) and optical microscopy are used to characterize the thin films.The infiltrating behaviour and laser-induced damage threshold(LIDT) of two-layer solgel SiO_2/ZrO...