Investigation of HgCdTe p-n device structures grown by liquid-phase epitaxy |
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Authors: | Changzhen Wang Steve Tobin Themis Parodos David J. Smith |
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Affiliation: | (1) Center for Solid State Science, Arizona State University, 85287-1704 Tempe, AZ;(2) BAE Systems, 02421 Lexington, MA;(3) Department of Physics and Astronomy, Arizona State University, 85287-1504 Tempe, AZ |
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Abstract: | The microstructure of p-n device structures grown by liquid-phase epitaxy (LPE) on CdZnTe substrates has been evaluated using transmission electron microscopy (TEM). The devices consisted of thick (∼21-μm) n-type layers and thin (∼1.6-μm) p-type layers, with final CdTe (∼0.5 μm) passivation layers. Initial observations revealed small defects, both within the n-type layer (doped with 8×1014/cm3 of In) and also within the p-type layer but at a much reduced level. These defects were not visible, however, in cross-sectional samples prepared by ion milling with the sample held at liquid nitrogen temperature. Only isolated growth defects were observed in samples having low indium doping levels (2×1014/cm3). The CdTe passivation layers were generally columnar and polycrystalline, and interfaces with the p-type HgCdTe layers were uneven. No obvious structural changes were apparent in the region of the CdTe/HgCdTe interfaces as a result of annealing at 250°C. |
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Keywords: | HgCdTe transmission electron microscopy (TEM) liquid-phase epitaxy (LPE) p-n junction CdTe passivation layer focused ion beam (FIB) |
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