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Investigation of HgCdTe p-n device structures grown by liquid-phase epitaxy
Authors:Changzhen Wang  Steve Tobin  Themis Parodos  David J. Smith
Affiliation:(1) Center for Solid State Science, Arizona State University, 85287-1704 Tempe, AZ;(2) BAE Systems, 02421 Lexington, MA;(3) Department of Physics and Astronomy, Arizona State University, 85287-1504 Tempe, AZ
Abstract:The microstructure of p-n device structures grown by liquid-phase epitaxy (LPE) on CdZnTe substrates has been evaluated using transmission electron microscopy (TEM). The devices consisted of thick (∼21-μm) n-type layers and thin (∼1.6-μm) p-type layers, with final CdTe (∼0.5 μm) passivation layers. Initial observations revealed small defects, both within the n-type layer (doped with 8×1014/cm3 of In) and also within the p-type layer but at a much reduced level. These defects were not visible, however, in cross-sectional samples prepared by ion milling with the sample held at liquid nitrogen temperature. Only isolated growth defects were observed in samples having low indium doping levels (2×1014/cm3). The CdTe passivation layers were generally columnar and polycrystalline, and interfaces with the p-type HgCdTe layers were uneven. No obvious structural changes were apparent in the region of the CdTe/HgCdTe interfaces as a result of annealing at 250°C.
Keywords:HgCdTe  transmission electron microscopy (TEM)  liquid-phase epitaxy (LPE)  p-n junction  CdTe passivation layer  focused ion beam (FIB)
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