| 电子辐照介质材料二次电子发射系数与能谱测量数据库 |
| |
| 引用本文： | 王芳, 黎东杰, 翁明, 封国宝, 曹猛, 张洪太. 电子辐照介质材料二次电子发射系数与能谱测量数据库[J]. 真空科学与技术学报, 2021, 41(12): 1142-1156. DOI: 10.13922/j.cnki.cjvst.202106016 |
| |
| 作者姓名： | 王芳 黎东杰 翁明 封国宝 曹猛 张洪太 |
| |
| 作者单位： | 1.1. 西安交通大学电子科学与工程学院电子物理与器件教育部重点实验室 西安 710049 |
| |
| 摘 要： | 电子辐照电介质材料的二次电子发射特性是影响各类真空电子器件与设备性能的重要参数,本文对电子束辐照下二十余种常用的典型介质材料的二次电子发射特性进行了实验测量研究.采用收集极负偏压法测量二次电子发射系数(SEY),通过给二次电子收集极加载不同的偏压来引导二次电子的运动,实现对积累电荷的中和,实验获得了介质材料的SEY随着...
|
| 关 键 词： | 介质 二次电子 二次电子发射系数 能谱 |
| 收稿时间： | 2021-06-16 |
Database of Secondary Electron Yield and Energy Spectra for Dielectric Samples by Electron Irradiation |
| |
| WANG Fang, LI Dongjie, WENG Ming, FENG Guobao, CAO Meng, ZHANG Hongtai. Database of Secondary Electron Yield and Energy Spectra for Dielectric Samples by Electron Irradiation[J]. CHINESE JOURNAL VACUUM SCIENCE AND TECHNOLOGY, 2021, 41(12): 1142-1156. DOI: 10.13922/j.cnki.cjvst.202106016 |
| |
| Authors: | WANG Fang LI Dongjie WENG Ming FENG Guobao CAO Meng ZHANG Hongtai |
| |
| Affiliation: | 1.1. Key Laboratory for Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi' an 710049, China |
| |
| Abstract: | Characteristics of secondary electron emission from dielectric materials by electron irradiation are critical to the performance of vacuum electronic devices and equipment. In this work,secondary electron yield(SEY)and energy spectra were measured for 22 kinds of dielectric samples. By the negatively biased secondary electron collector for neutralizing charges accumulated in the sample during electron irradiation,SEY was measured by using a single pulsed electron gun. Secondary electron spectra at different primary energy of electrons were obtained by a high resolution electron spectrometer in successive electron pulse irradiation. Parameters describing the SEY curves as the maximum SEY σmax,the first and secondary cross energy E1 and E2,and the full width at half maxima(FWHM)of true secondary electrons in the spectra were given. Based on the measurements,the database of secondary electron yield and spectra for typical dielectric samples was established,which could provide valuable information to related applications. |
| |
| Keywords: | Dielectric Secondary electron Secondary electron yield Energy spectrum |
|
| 点击此处可从《真空科学与技术学报》浏览原始摘要信息 |
|
点击此处可从《真空科学与技术学报》下载全文 |
|
