| 二维抗反射亚波长周期结构光栅的设计分析 |
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| 引用本文： | 曹召良,卢振武,李凤友,张慧娟,孙强. 二维抗反射亚波长周期结构光栅的设计分析[J]. 光学精密工程, 2002, 10(6): 537-541 |
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| 作者姓名： | 曹召良 卢振武 李凤友 张慧娟 孙强 |
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| 作者单位： | 1. 中国科学院长春光学精密机械与物理研究所,应用光学国家重点实验室,吉林,长春,130022
2. 南开大学,现代光学研究所,光电信息技术科学教育部重点实验室,天津,300071 |
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| 基金项目： | 国家自然科学基金(No.60078006)，科学院创新基金资助 |
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| 摘 要： | 利用严格耦合波理论(RCWA)和等效介质理论(EMT)研究了二维抗反射亚波长周期结构光栅的设计问题.以立方体和柱状单台阶网格光栅和金字塔形及圆锥形多台阶光栅为例,主要研究了占空比和表面面形对反射率的影响.通过计算发现,当光栅周期足够小的时候,光栅面形对反射率没有影响,同时占空比严重影响着光栅的特性,这对设计制造抗反射光栅非常有用.同时也研究了等效介质理论的适用性.
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| 关 键 词： | 抗反射 亚波长 占空比 反射率 表面面形 |
| 文章编号： | 1004-924X(2002)06-0537-05 |
| 收稿时间： | 2002-04-23 |
| 修稿时间： | 2002-04-23 |
Design consideration of two-dimensional anti-reflective subwavelength periodic gratings |
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| CAO Zhao-liang,LU Zhen-wu,LI Feng-you,ZHANG Hui-juan,SUN Qiang. Design consideration of two-dimensional anti-reflective subwavelength periodic gratings[J]. Optics and Precision Engineering, 2002, 10(6): 537-541 |
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| Authors: | CAO Zhao-liang LU Zhen-wu LI Feng-you ZHANG Hui-juan SUN Qiang |
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| Affiliation: | 1. State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130022, China;2. Key Laboratory of Opto-electronic Information Science and Technology, Institute of Modern Optics, Nankai University, Tianjin, 300071, China |
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| Abstract: | This paper investigates the design of a two_dimensional anti_reflective subwavelength grating, by means of RCWA and EMT, take for example, the square_pillar and columned binary gratings, and pyramidal and coned multi_level gratings, the impact of filling factor and surface profile on the reflectance of a grating are mainly considered. It is shown that surface profile has no effect on the reflectivity when the period is sufficiently small, but the wavelength and the filling factor have an important impact on the diffraction characteristics of the grating. So it is very important to design an anti_reflective grating. The validity of EMT is also investigated in the paper. |
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| Keywords: | anti_reflection subwavelength filling factor reflectivity surface profile period |
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