| 表面粗糙度、表面微观轮廓及微位移激光测量集成化方法的研究 |
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| 引用本文： | 李文杰,张涛,黄伟. 表面粗糙度、表面微观轮廓及微位移激光测量集成化方法的研究[J]. 四川大学学报(工程科学版), 2000, 32(6): 78-81 |
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| 作者姓名： | 李文杰 张涛 黄伟 |
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| 作者单位： | 四川大学,激光应用研究所,成都,610065 |
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| 基金项目： | 国家自然科学基金资助项目! (5 95 70 5 8) |
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| 摘 要： | 通过研究激光散射法测量表面粗糙度、三角法测量微位移、干涉法测量表面微观轮廓三种几何量测量技术的共性，设计新型光路，将三咱光电测量技术集成为一个测量仪，使其成为采用同一光源、基本同一光路、同一光敏接收器的新型光电精密测量仪器，而同时具有三种测量功能。
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| 关 键 词： | 表面微观轮廓 激光测量 表面粗糙度 激光散射法 微位移 集成化方法 |
| 修稿时间： | : |
Research on Electro-optical Integration of Measuring Surface Roughness, Surface Micro-profile and Micro-displacement by Laser |
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| LI Wen-jie,ZHANG Tao,HUANG Wei. Research on Electro-optical Integration of Measuring Surface Roughness, Surface Micro-profile and Micro-displacement by Laser[J]. Journal of Sichuan University (Engineering Science Edition), 2000, 32(6): 78-81 |
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| Authors: | LI Wen-jie ZHANG Tao HUANG Wei |
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| Abstract: | Through the study of the surface roughness measurement by laser diffusion method,micro displacement measurement by optical triangle method and surface micro profile measurement by interference method, a new type of electro optical measuring instrument is designed. The three techniques are integrated into this instrument.It has the same light source,generally the same optical path and the same electro optical receiver and has the three functions simultaneously. |
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| Keywords: | surface micro profile optical measurement surface roughness Laser diffusion method |
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