| 底座激振下检测微型叠层芯片共振频率 |
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| 引用本文： | 韩雷,严国政.底座激振下检测微型叠层芯片共振频率[J].振动与冲击,2012,31(7):153-157. |
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| 作者姓名： | 韩雷 严国政 |
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| 作者单位： | (中南大学 机电工程学院 湖南长沙 410083) |
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| 基金项目： | 国家重大基础研究发展计划项目(2009CB724203);国家高技术研究发展计划(2009AA04Z307) |
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| 摘 要： | 摘 要：为测试微悬臂芯片的动态特性，建立了以压电陶瓷为激振底座的测试系统。采用白噪声、稳态正弦和快速正弦（啁啾信号）扫频方式激励微叠层悬臂芯片，由多普勒测振仪测试芯片动态响应。通过分析压电陶瓷阻抗变化与芯片动态响应，获得的频率对应于压电陶瓷激振器所激励叠层芯片的一阶共振频率，这可作为微结构和器件的动态分析的测试方案。
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| 关 键 词： | 压电陶瓷激振器 底座激振 多普勒测振仪 阻抗分析 叠层芯片 共振频率 |
Resonant frequency measurement for a micro stacked chip with base excitation |
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| HAN Lei,YAN Guo-zheng.Resonant frequency measurement for a micro stacked chip with base excitation[J].Journal of Vibration and Shock,2012,31(7):153-157. |
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| Authors: | HAN Lei YAN Guo-zheng |
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| Affiliation: | College of Mechanical & Electrical Engineering，Central South University, Changsha 410083,China |
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| Abstract: | A piezo-actuator was used as a base excitation for measuring dynamical characteristics of a micro stacked chip.White-noise,steady-state sinusoidal and fast sine sweep(chirp) excitations were used to excite the stacked chip.Vibration of the chip was recorded by using a Laser Doppler Vibrometer(LDV).By analyzing the changes in impedance of the actuator and the dynamic responses of the chip,the obtained peak frequency agreed well with the first resonant frequency of the stacked chip.This provided a testing scheme for dynamical analysis of microstructures and microcomponents. |
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| Keywords: | piezo-actuator base excitation laser doppler vibrometer impedance analyzer stacked chip resonant frequency |
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