Highly polarized single-c-domain single-crystal Pb(Mn,Nb)O(3)-PZT thin films |
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Authors: | Wasa Kiyotaka Adachi Hideaki Nishida Ken Yamamoto Takashi Matsushima Tomoaki Kanno Isaku Kotera Hidetoshi |
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Affiliation: | Department of Microengineering, Kyoto University, Kyoto, Japan. kiyotaka.wasa@gmail.com |
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Abstract: | In-plane unstrained single-c-domain/single-crystal thin films of PZT-based ternary ferroelectric perovskite, ξPb(Mn,Nb)O3-(1 - ξ)PZT, were grown on SrRuO(3)/Pt/MgO substrates using magnetron sputtering followed by quenching. The sputtered unstrained thin films exhibit unique ferroelectric properties: high coercive field, Ec > 180 kV/cm, large remanent polarization, P(r) = 100 μC/cm(2), small relative dielectric constants, ε* = 100 to 150, high Curie temperature, Tc = ~600 °C, and bulk-like large transverse piezoelectric constants, e31,f = -12.0 C/m(2) for PZT(48/52) at ξ = 0.06. The unstrained thin films are an ideal structure to extract the bulk ferroelectric properties. Their micro-structures and ferroelectric properties are discussed in relation to the potential applications for piezoelectric MEMS. |
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