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镀覆工艺对功率外壳金锡/金硅焊接的可靠性研究
引用本文:谢新根,程凯,李鑫,孙林. 镀覆工艺对功率外壳金锡/金硅焊接的可靠性研究[J]. 固体电子学研究与进展, 2019, 39(2): 144-149
作者姓名:谢新根  程凯  李鑫  孙林
作者单位:南京电子器件研究所,南京,210016;南京电子器件研究所,南京,210016;南京电子器件研究所,南京,210016;南京电子器件研究所,南京,210016
摘    要:通过功率外壳金硅(AuSi)焊接失效案例,研究了铜-钼铜-铜(CPC)、铜-钼-铜(CMC)为热沉材料的功率外壳镀覆工艺,包括在CPC(或CMC)材料无氧铜表面高温重新形成晶格,采用外延生长型NiCo/Au替代Ni/Au镀层。镀覆工艺优化后,功率外壳金锡(AuSn)或AuSi芯片焊接可靠性得到了显著改善。

关 键 词:功率外壳  金锡  金硅  晶格  外延生长  镍钴

Study on the Reliability of Plating Process to the Power Packages AuSn/AuSi Welding
XIE Xingen,CHENG Kai,LI Xin,SUN Lin. Study on the Reliability of Plating Process to the Power Packages AuSn/AuSi Welding[J]. Research & Progress of Solid State Electronics, 2019, 39(2): 144-149
Authors:XIE Xingen  CHENG Kai  LI Xin  SUN Lin
Affiliation:(Nanjing Electronic Devices Institute ,Nanjing,210016,CHN)
Abstract:Through the failure case of AuSi welding of power package,the plating processes of power package with Cu-MoCu-Cu(CPC),Cu-Mo-Cu(CMC)as heat sink material were studied,including recrystallization of crystal lattice on the surface of oxygen free copper of CPC(or CMC)at high temperature,replacement of the Ni/Au coating with the epitaxial growth type NiCo/Au.After the plating process is optimized,the reliability of the power package AuSn or AuSi chip solder has been significantly improved.
Keywords:power package  AuSn  AuSi  crystal lattice  epitaxial growth  NiCo
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