Analytical models for n+-p+ double-gate SOIMOSFET's |
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Authors: | Suzuki K. Sugii T. |
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Affiliation: | Fujitsu Labs. Ltd., Atsugi; |
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Abstract: | Previously, we proposed n+-p+ double-gate SOI MOSFET's, which have n+ polysilicon for the back gate and p+ polysilicon for the front gate to enable adjustment of the threshold voltage, and demonstrated high speed operation. In this paper, we establish analytical models for this device, This transistor has two threshold voltages related to n+ and p+ polysilicon gates: Vth1 and Vth2, respectively. V th1 is a function of the gate oxide thickness tOx and SOI thickness tSi and is about 0.25 V when tOx/tSi=5, while Vth2 is insensitive to tOx and tSi and is about 1 V. We also derive models for conduction charge and drain current and verified their validity by numerical analysis. Furthermore, we establish a scaling theory unique to the device, and show how to design the device parameters with decreasing gate length. We show numerically that we can design sub 0.1 μm gate length devices with an an appropriate threshold voltage and an ideal subthreshold swing |
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