多弧离子镀制备Cr/CrN多层厚膜的微观结构和力学性能

通过多弧离子镀（MAIP）在室温下将具有不同调制比（1:2、1:3、1:5）的多层Cr/CrN厚涂层沉积在A100钢基底上。腔室温度在沉积过程中由室温逐渐升高到160~170 ℃。设计调制结构是为了使膜/基结合强度和机械性能最大化。调制比为1:2的Cr/CrN多层涂层表现出最高的膜/基结合强度（L_c=63.8 N），这可能归因于最高的材料硬度(H)/弹性模量(E)和H³/E²数值比（分别为0.083和0.138）。Cr层越厚，多层Cr/CrN厚涂层的塑性和摩擦学性能越好。干摩擦试验表明，与单层CrN相比，Cr/CrN多层涂层的平均摩擦系数和比磨损率分别最高降低了24%和94%。随着Cr层变厚，磨损机理从表面疲劳磨损转变为磨料磨损，这种现象可归因于硬度和塑性的协调变化。

Microstructure and Mechanical Properties of Thick Cr/CrN Multilayer Coatings by Multi-arc Ion Plating

The thick Cr/CrN multilayer coatings with different modulation ratios (1:2, 1:3, 1:5) were deposited on the A100 steel substrate at room temperature by multi-arc ion plating (MAIP). The chamber temperature gradually rose to 160~170 °C during deposition. The modulation structures are designed to optimize the adhesion strength and the mechanical properties. The Cr/CrN multilayer coating with modulation ratio of 1:2 exhibits the highest adhesive strength (L_c=63.8 N), which may be attributed to the highest hardness (H)/elastic modules (E) and H³/E² values of 0.083 and 0.138, respectively. The thicker the Cr layer, the better the plasticity and tribological properties. The dry friction test shows that the mean coefficient of friction and the specific wear rate of Cr/CrN multilayer coating are decreased by 24% and 94% at most, respectively, compared with those of the single-layer CrN coating. As the Cr layer becomes thick, the wear mechanism is transformed from surface fatigue wear to abrasive wear, which may be attributed to the coordinate changes of hardness and plasticity.