| 高质量光学薄膜制备用新型无栅霍尔离子束辅助镀膜系统 |
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| 引用本文： | 冯毓材,江建国. 高质量光学薄膜制备用新型无栅霍尔离子束辅助镀膜系统[J]. 光学仪器, 2001, 0(Z1) |
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| 作者姓名： | 冯毓材 江建国 |
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| 作者单位： | 北京东方安泰克高技术有限公司 北京100101(冯毓材)，北京光电技术研究所 北京100010(江建国) |
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| 摘 要： | 介绍一种无栅霍尔离子束辅助镀膜系统。并对该系统的特点、性能和应用结果作了叙述。
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| 关 键 词： | 无栅霍尔离子源 离子束辅助沉积 光学薄膜 |
A new type gridless hall ion beam assisted deposition system for preparing high quality optic thin films |
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| FENG Yu cai,JIANG Jian guo. A new type gridless hall ion beam assisted deposition system for preparing high quality optic thin films[J]. Optical Instruments, 2001, 0(Z1) |
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| Authors: | FENG Yu cai JIANG Jian guo |
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| Affiliation: | FENG Yu cai 1,JIANG Jian guo 2 |
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| Abstract: | This paper introduces a gridless Hall ion beam assisted deposition system.In this paper,the feature and performance of this ion surce are described.The preliminary results for preparing optic thin films are presented. |
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| Keywords: | gridless hall ion source ion beam assisted deposition optic thin film |
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