| 微系统技术（连载一）─—微系统技术概况 |
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| 引用本文： | 张光照. 微系统技术（连载一）─—微系统技术概况[J]. 传感器与微系统, 1995, 0(4) |
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| 作者姓名： | 张光照 |
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| 作者单位： | 东北传感技术研究所 |
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| 摘 要： | 简要介绍微系统的含义，主要工艺、发展历史、现状和发展前景。
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| 关 键 词： | 微系统技术，微机械，微电子，微光学，集成化 |
Microsystem Technology(Serial One) Situation of Microsystem Technology |
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| Zhang Guangzhao. Microsystem Technology(Serial One) Situation of Microsystem Technology[J]. Transducer and Microsystem Technology, 1995, 0(4) |
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| Authors: | Zhang Guangzhao |
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| Affiliation: | Northeast China Research Institute of Transduction Techology |
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| Abstract: | Implication of the Microsystem, the main technologies, history of development, current status and development perspectives are brifly presented. |
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| Keywords: | Microsptem technology Micromachining MicroelectronicsMicroptics Integrations |
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