| Mo对多弧离子镀(Ti,Mo)xN涂层组织与性能的影响 |
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| 引用本文： | 曾鹏,胡社军,谢光荣,黄拿灿,吴起白.Mo对多弧离子镀(Ti,Mo)xN涂层组织与性能的影响[J].金属热处理,2000(8). |
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| 作者姓名： | 曾鹏 胡社军 谢光荣 黄拿灿 吴起白 |
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| 作者单位： | 广东工业大学机械系,广州,510643 |
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| 基金项目： | 广东省高教厅科研项目，广东工业大学校科研和教改项目 |
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| 摘 要： | 采用Ti/Mo复合靶 ,用多弧离子镀技术沉积了 (Ti,Mo) xN多元涂层 ,研究了Mo对该涂层组织与性能的影响。结果表明 ,涂层的主要结构为 (Ti,Mo) 2 N ,其中Mo的固溶度可达 4 56% (质量分数 ) ,并具有较高的显微硬度、抗氧化性和低的孔隙率。在沉积过程中存在着多元合金涂层与复合靶的成分离析现象 ,这与靶材的结构有关。
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| 关 键 词： | 多弧离子镀 (Ti Mo)_xN涂层 组织性能 成分离析 |
Effect of Mo on Microstructure and Properties of (Ti,Mo)xN Coatings Deposited by Multi-Arc Ion Plating |
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| ZENG Peng,HU She-jun,XIE Guang-rong,HUANG Na-can,WU Qi-bai.Effect of Mo on Microstructure and Properties of (Ti,Mo)xN Coatings Deposited by Multi-Arc Ion Plating[J].Heat Treatment of Metals,2000(8). |
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| Authors: | ZENG Peng HU She-jun XIE Guang-rong HUANG Na-can WU Qi-bai |
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| Abstract: | Z](Ti,Mo) xN coatings were deposited by multi-arc ion plating using the Ti/Mo composite cathode target.The microstructure and properties of the coatings were studied.The results showed that the coatings consisted of (Ti,Mo) 2N mainly,which solubility of Mo reached to 4.56%(wt),with high micro-hardness and oxidation resistance and low porosity.The composition demixing phenomena of the coatings and composite target were analyzed. |
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| Keywords: | multi-arc ion plating (Ti Mo) xN coating microstructure and properties composition demixing |
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