基于微电子机械系统的光学电流传感器原理与设计

光学电流传感器解决了传统电流互感器的缺点，但仍然存在生产困难、性能易受环境温度影响等不足，MEMS作为一种新兴技术，可批量生产各种性能良好的微电子器件，该文提出了将MEMS技术用于检测高压交流电的光学电流传感器。高压侧的传感装置由Rogowski线圈、MEMS扭转微镜和双光纤准直器组成。文中介绍了器件的高压侧敏感原理和光学检出原理，给出了器件的结构参数条件、模态分析和温度补偿结果，并利用ANSYS与Matlab软件对器件的性能进行了仿真模拟和分析。理论结果表明：温度补偿后，温度变化±50K时测试误差为0.2%，400A、2000A电流下的灵敏度分别为0.001dB/A 与0.09dB/A, 说明了基于MEMS技术的光学电流传感器具有一定的研究价值。

Theory and Design of Optical Current Sensor Based on MEMS

Optical current sensors have conquered the disadvantage of conventional optical current transducer, but they are faced with some shortcomings, such as difficulty of production and unstable performance influenced by environmental temperature. Many good performance devices can be in batches fabricated by novel MEMS technology. A MEMS-OCS (Micro-Electronic Mechanic System-Optical Current Sensor) detecting high alternating current was introduced. Its sensing head of primary side is composed of Rogowski coils, torsional micro-mirror and dual fiber collimator. Theory about sensing and optical transition was explained in this paper, parameters, model analysis and temperature compensation result of the sensor were showed, and performance of the device was simulated and analyzed by ANSYS and Matlab. The results show: when the temperature varies ±50K, the precision of the sensor is 0.2% after temperature compensation, the sensitivity at current of 400A and 2000A is respective 0.001dB/A and 0.09dB/A. Optical current sensor based on MEMS has important research value.