| 激光差动共焦曲率半径测量系统的研制 |
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| 引用本文： | 孙若端,邱丽荣,杨佳苗,赵维谦.激光差动共焦曲率半径测量系统的研制[J].仪器仪表学报,2011,32(12). |
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| 作者姓名： | 孙若端 邱丽荣 杨佳苗 赵维谦 |
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| 作者单位： | 北京理工大学光学测量研究中心 北京100081 |
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| 基金项目： | 国家重大科学仪器设备开发专项，北京理工大学优秀博士学位论文育苗基金、北京理工大学研究生科技创新基金 |
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| 摘 要： | 针对国内高精度曲率半径计量需求,研制一套激光差动共焦曲率半径测量系统.该系统采用差动共焦定焦技术,利用轴向光强响应曲线的过零点精确对应物镜聚焦焦点这一特性,借助过零点对被测件的猫眼和共焦位置进行精密瞄准定位,通过干涉测长技术获取两点间的距离,继而实现曲率半径的高精度测量.该测量系统的机电控制由主控软件完成,可实现机电扫描、数据采集及数据处理,自动化程度高.实验证明,该系统定焦灵敏度高,受环境波动影响小,测量精度可达3×10-6,满足了高精度曲率半径的计量需求.
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| 关 键 词： | 差动共焦 曲率半径 定焦 |
Development of laser differential confocal radius measurement system |
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| Sun Ruoduan,Qiu Lirong,Yang Jiamiao,Zhao Weiqian.Development of laser differential confocal radius measurement system[J].Chinese Journal of Scientific Instrument,2011,32(12). |
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| Authors: | Sun Ruoduan Qiu Lirong Yang Jiamiao Zhao Weiqian |
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| Affiliation: | Sun Ruoduan,Qiu Lirong,Yang Jiamiao,Zhao Weiqian(Optical Measurement Center,Beijing Institute of Technology,Beijing 100081,China) |
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| Abstract: | Aiming at the demand of high-precision radius metrology,a laser differential confocal radius measurement system is designed.Based on the property that the zero crossing point of a differential confocal intensity curve corresponds to the focus of the objective,the system uses the zero-crossing point to precisely identify the cat-eye and confocal positions of the tested device,and uses an interferometer to measure the distance between the two positions and achieve high-precision measurement of radius of curva... |
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| Keywords: | differential confocal radius of curvature focusing |
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