| 电真空陶瓷表面斑点新探 |
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| 引用本文： | 伍智,彭康,黄晓军,杨卫英,宋春林. 电真空陶瓷表面斑点新探[J]. 真空, 2006, 43(1): 51-53 |
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| 作者姓名： | 伍智 彭康 黄晓军 杨卫英 宋春林 |
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| 作者单位： | 中物院电子工程研究所,四川,绵阳,621900 |
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| 基金项目： | 中国物理研究院资助项目 |
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| 摘 要： | 应用SEM微区分析和小束XRD扫描，对95％氧化铝电真空陶瓷金属化后的表面斑点等异常现象进行剖析。确认了表面黑点是由变价金属离子形成的；花斑的形貌并无异常，而其物相结构与正常陶瓷相比，缺乏硅酸铝钙相，且有少量新相生成；透光性差的陶瓷有明显的异相形成。此外，还证实了陶瓷表面的晶化现象。
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| 关 键 词： | 电真空陶瓷 斑点 剖析 |
| 文章编号： | 1002-0322（2005）01-0051-03 |
| 收稿时间： | 2005-06-15 |
| 修稿时间： | 2005-06-15 |
New exploration of surface speckles of electronic-vacuum ceramics |
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| WU Zhi,PENG Kang,HHANG Xiao-jun,YANG Wei-ying,SONG Chun-lin. New exploration of surface speckles of electronic-vacuum ceramics[J]. Vacuum(China), 2006, 43(1): 51-53 |
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| Authors: | WU Zhi PENG Kang HHANG Xiao-jun YANG Wei-ying SONG Chun-lin |
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| Affiliation: | Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621900,China |
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| Abstract: | The speckles and other abnormalities found on the surface of metallized electronic-vacuum ceramics containing 95% alumina were investigated by way of micro-zone SEM analysis and microbeam scanning XRD, from which it is concluded that the black speckles are formed by variable valency metal ions. No abnormal morphology was found among mottled speckles and, in comparison to the phase structare of normal ceramics, no sufficient aluminium-calcium silicate phases were found among the mottled speckles but a bit of new phases were formed. The ceramics with low transmittance shows clearly the formation of heterophase, with its surface crystallization verified. |
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| Keywords: | SEM XRD |
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