| 电真空器件残气质谱分析和贮存寿命的快速测试研究 |
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| 引用本文： | 崔云康,张晓兵,雷威,肖梅,狄云松,王金婵,毛福明.电真空器件残气质谱分析和贮存寿命的快速测试研究[J].真空科学与技术学报,2007,27(1):80-83. |
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| 作者姓名： | 崔云康 张晓兵 雷威 肖梅 狄云松 王金婵 毛福明 |
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| 作者单位： | 1. 东南大学电子科学与工程学院,南京,210096;南京工程学院基础部,南京,210013
2. 东南大学电子科学与工程学院,南京,210096 |
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| 基金项目： | 国家重点基础研究发展计划(973计划);高等学校博士学科点专项科研项目;教育部跨世纪优秀人才培养计划 |
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| 摘 要： | 电真空器件内的残气压强是制管和管子工作过程中管内吸气剂材料吸气后形成的平衡压强,器件击破后质谱分析室本底气体会被吸气剂吸收。因质谱分析室放出的本底气体量一般远小于吸气剂在器件内原吸收的气体量,故器件内的残气压强的新平衡值增量可以忽略,分析室本底不会影响正确的分析结果;大气漏入管内后只表现出该管内惰性气体氩的积累;据此,我们提出了充氩法贮存寿命的快速测试方法。只有吸气剂失效或吸气饱和后管内残气质谱图才反映出漏入的大气成份或分析室本底气体干扰的特征。
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| 关 键 词： | 电真空器件 残余气体 质谱分析 特性 |
| 文章编号： | 1672-7126（2007）01-080-04 |
| 修稿时间： | 2006-04-24 |
Mass Spectroscopy Study of Residual Gases in Vacuum Electronic Devices and Its Storage Lifetime |
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| Cui Yunkang,Zhang Xiaobing,Lei Wei,Xiao Mei,Di Yunsong,Wang Jinchan,Mao Fuming.Mass Spectroscopy Study of Residual Gases in Vacuum Electronic Devices and Its Storage Lifetime[J].JOurnal of Vacuum Science and Technology,2007,27(1):80-83. |
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| Authors: | Cui Yunkang Zhang Xiaobing Lei Wei Xiao Mei Di Yunsong Wang Jinchan Mao Fuming |
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| Affiliation: | 1. School of Electronic Science and Engineering, Southeast University, Nanjing 210096, China ; 2. Dept. of Basic Courses, Nanjing Institute of technology, Nanjing 210013, China |
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| Abstract: | A novel technique was developed for fast testing the storage lifetime of vacuum electronic devices with getter inside by mass spectroscopy.Filling in argon at atmospheric pressure for the vacuum electronic device is the main idea.Residual gases in the devices were studied with quadrupole mass spectroscopy(QMS).We found that the residual gases background in the vacuum chamber and the getter of the device little affect the test. |
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| Keywords: | Vacuum electronic device Residual gas Mass spectrographic analysis Characteristic |
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