| 测定金属薄膜屈服强度的纳米压入法研究 |
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| 引用本文： | 马德军,徐可为,何家文.测定金属薄膜屈服强度的纳米压入法研究[J].金属学报,1998,34(6):661-666. |
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| 作者姓名： | 马德军 徐可为 何家文 |
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| 作者单位： | 西安交通大学金属材料强度国家重点实验室!西安，710049，西安交通大学金属材料强度国家重点实验室!西安，710049，西安交通大学金属材料强度国家重点实验室!西安，710049 |
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| 基金项目： | 国家自然科学基金!59571031 |
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| 摘 要： | 利用有限元数值分析方法，对球形刚性压头压入由金属膜与硅基体组成的膜－基体系的加载过程进行了模拟计算。建立了薄膜硬化指数同载荷－位移曲线的特征值， 服强度，硬化指数及扬氏模量同最大压入载荷间的关系。据此，可由纳米压入仪实测所得载荷－位移曲线的特征值与最大压入载荷，确定金属薄膜材料的应变硬化指数和屈服强度。
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| 关 键 词： | 金属薄膜 屈服强度 纳米压入法 有限元 |
| 收稿时间： | 1998-06-18 |
| 修稿时间： | 1998-06-18 |
A NEW METHOD ON EVALUATING THE YIELD STRENGTH OF METAL FILMS USING DEPTH-SENSING INDENTATION INSTRUMENT |
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| MA Dejun,XU Kewei,HE JiawenCorespondent :HE Jiawen,professor Tel: ,For: ,E-mail: jwheoritu.edu.cn.A NEW METHOD ON EVALUATING THE YIELD STRENGTH OF METAL FILMS USING DEPTH-SENSING INDENTATION INSTRUMENT[J].Acta Metallurgica Sinica,1998,34(6):661-666. |
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| Authors: | MA Dejun XU Kewei HE JiawenCorespondent :HE Jiawen professor Tel: For: E-mail: jwheoritueducn |
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| Affiliation: | MA Dejun,XU Kewei,HE Jiawen(State Key Laboratory for Mechanical Behavior of Materials,Xi'an Jiaotong University Xi'an )Corespondent :HE Jiawen,professor Tel: (),For: (),E-mail: jwheoritu.edu.cn |
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| Abstract: | The fiaite element method of elastoplastic large strain was employed to study the indentation erperhoent of thin metal films on silicon substrate combinatioll by a raid spheriod indenter. The relationship between the hardening index of the film and the charactedstic value of load--displaCement curve, and that among the yield strength, hardening indeX, Youness modulus of the film and the m applied load have been established. Co-cub theSe twoforacteristic s and the maxinunn load given by nanoboedtstion test, the hardening index and po strength of the metal oh can be obtained. |
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| Keywords: | Metal film yield strength nanoindeatation method finite element method |
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