The investigation of physicochemical processes of silica glass doping with fluorine by the MCVD method |
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Authors: | M A Eron’yan |
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Affiliation: | 1. Research and Technological Institute of Optic Materials, All-Russia Science Center, Babushkina ul. 36/1, St. Petersburg, 193171, Russia
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Abstract: | The temperature-time dependences for sintering and fluorination processes of SiO2 nanoparticles obtained by the method of chemical vapor deposition are presented. It has been revealed that at the SiF4 pressure of 1 atm, the intensive agglomeration of high-dispersive layers prevents the achievement of equilibrium between the fluorine-containing gas media and the condensed phase. The saturation of the porous layers with fluorine occurs at temperatures less than 1100°C, when the sintering duration of high-dispersive particles is substantially longer than the fluorination process time. |
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