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全玻璃太阳集热管烘烤排气工艺采用复合分子泵抽高真空
引用本文:王双,苗建朋,周旭,池华敬,陈革,章其初. 全玻璃太阳集热管烘烤排气工艺采用复合分子泵抽高真空[J]. 真空, 2010, 47(2)
作者姓名:王双  苗建朋  周旭  池华敬  陈革  章其初
作者单位:皇明太阳能集团镀膜研发中心,山东,德州,253000
摘    要:采用复合分子泵替代油扩散泵进行全玻璃真空太阳集热管排气烘烤抽高真空试验。选用了三种型号分子泵,在集热管自动连续烘烤排气线上进行实验。经过约一年较长时间生产运行试验后,分子泵经受了190次以上的集热管管口破裂引起的大气冲击,没有损坏,抽真空性能无明显变化。采用分子泵烘烤排气工艺制备的集热管,按国标在温度350℃,48 h高温老化试验后,吸气剂镜面消失率约为5%,仅为国标规定值的10%。

关 键 词:复合分子泵  太阳集热管  排气烘烤  大气冲击  真空性能

HV evacuation for all-glass solar collector tubes by hybrid turbomolecular pumps in baking process
WANG Shuang,MIAO Jian-peng,ZHOU Xu,CHI Hua-jing,CHEN Ge,ZHANG Qi-chu. HV evacuation for all-glass solar collector tubes by hybrid turbomolecular pumps in baking process[J]. Vacuum(China), 2010, 47(2)
Authors:WANG Shuang  MIAO Jian-peng  ZHOU Xu  CHI Hua-jing  CHEN Ge  ZHANG Qi-chu
Affiliation:WANG Shuang,MIAO Jian-peng,ZHOU Xu,CHI Hua-jing,CHEN Ge,ZHANG Qi-chu(R&D Center for Coatings,Himin Solar Group Company,Dezhou 253000,China)
Abstract:The hybrid turbomolecular pumps were used in the tests of the blending line as a baking-evacuating sytem for all-glass solar collector tubes.Three models of turbomolecular pumps were chosen instead of oil diffusion pumps,and each of them was mounted onto a trolley where 40 tubes are arranged in line for baking and evacuating tests.After the trial production over one year during which the molecular pumps suffered atmospheric shocks over 190 times due to glass tube cracking,those pumps were not damaged especi...
Keywords:hybrid turbomolecular pump  solar collector tube  baking  evacuating  atmospheric shock  vacuum performance  
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