首页 | 本学科首页   官方微博 | 高级检索  
     


Sol-Gel Based Soft Lithography and Piezoresponse Force Microscopy of Patterned Pb(Zr_(0.52)Ti _(0.48))O_3 Microstructures
Authors:Lining Lan  Shuhong Xie  Li Tan  Jiangyu Li
Affiliation:1. Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education, and Faculty of Materials, Optoelectronics and Physics, Xiangtan University, Xiangtan 411105, China;2. Department of Engineering Mechanics, University of Nebraska, Lincoln, 68588-0526, USA;3. Department of Mechanical Engineering, University of Washington, Seattle, Washington, 98195-2600, USA;1. Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education, School of Materials Science and Engineering, Xiangtan University, Hunan 411105, China;2. Shenzhen Key Laboratory of Nanobiomechanics, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China;1. Department of Physics, Himachal Pradesh University, Shimla, 171005, India;2. Department of Physics, Jaypee University of Information Technology, Waknaghat, Solan, 173215, India;1. Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education, Faculty of Materials, Optoelectronics and Physics, Xiangtan University, Hunan 411105, China;2. Department of Mechanical Engineering, University of Washington, Seattle, WA 98195-2600, USA;1. Department of Electronics, Informatics and Telecommunications, École Nationale des Sciences Appliquées d’Oujda (ENSAO), University of Mohamed Premier, Oujda, Morocco;2. Dept. Physique, Faculty of Science, Abdelmalek Essaadi University, Tetouan, Morocco;3. FEMTO-ST Institut, Department LOPMD, 16 route de Gray, Franche-Comté University, 25030 Besançon, France;4. Nanomedecine Lab, CHU Jean MINJOZ, University of Franche-Comté, 25030 Besançon, France
Abstract:Sol-gel based soft lithography technique has been developed to pattern a variety of ferroelectric Pb(Zr0.52Ti0.48)O3(PZT) microstructures,with feature size approaching 180 nm and good pattern transfer between the master mold and patterned films.X-ray diffraction and high-resolution transmission electron microscopy confirm the perovskite structure of the patterned PZT.Piezoresponse force microscopy(PFM) and switching spectroscopy piezoresponse force microscopy(SSPFM) confirm their piezoelectricity and ferroe...
Keywords:Soft lithography  Piezoresponse force microscopy  Pb(Zr0.52Ti0.48)O3  
本文献已被 CNKI ScienceDirect 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号