| Ti/TiO2多层膜的光电性能研究 |
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| 引用本文： | 武素梅,薛钰芝,苏梦.Ti/TiO2多层膜的光电性能研究[J].真空,2007,44(4):29-32. |
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| 作者姓名： | 武素梅 薛钰芝 苏梦 |
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| 作者单位： | 大连交通大学材料科学与工程学院,辽宁,大连,116028 |
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| 摘 要： | 用真空蒸发和自然氧化法在玻璃基底上制备了Ti／TiO2多层膜，并检测了薄膜的光电性能。电性能检测表明Ti／TiO2多层膜存在类负阻效应，多层膜的层间的类负阻效应比表面的更明显，薄膜的层间电阻率高于表面电阻率；用分光光度计测得试样退火前后的透射谱；用X射线衍射仪和扫描电镜检测了Ti／TiO2多层膜的晶体结构和表面形貌。
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| 关 键 词： | Ti/TiO2多层膜 真空蒸发 类负阻效应 光电性能 |
| 文章编号： | 1002-0322（2007）04-0029-04 |
| 修稿时间： | 2006-12-07 |
Optical and electrical properties of Ti/TiO2 multilayer films |
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| WU Su-mei,XUE Yu-zhi,SU Meng.Optical and electrical properties of Ti/TiO2 multilayer films[J].Vacuum,2007,44(4):29-32. |
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| Authors: | WU Su-mei XUE Yu-zhi SU Meng |
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| Affiliation: | Department of Materials Science and Engineering ,Dalian Jiao Tong University, Dalian 116028, China |
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| Abstract: | Ti/TiO2 multilayer films were prepared on glass substrate by vacuum evaporation and natural oxidation with their optical and electrical properties tested. The results showed that the films have near negative resistance effect which is found more obvious between layers than on film surface, and the interlayer resistivity is higher than surface resistivity. The transmittance spectra of the film specimens before and after annealing were obtained by a spectrophotometer. The crystal structure and surface morphology of Ti/TiO2 multilayer films were examined by XRD and SEM. |
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| Keywords: | Ti/TiO2 multilayer film vacuum evaporation near negative resistance effect optical and electrical properties |
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