| 甲烷浓度对MPCVD金刚石膜色度的影响 |
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| 引用本文： | 杜康,徐伟,贺中信,吴智量,彭军.甲烷浓度对MPCVD金刚石膜色度的影响[J].光学仪器,2009,31(4):88-92. |
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| 作者姓名： | 杜康 徐伟 贺中信 吴智量 彭军 |
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| 作者单位： | 广州大学,物理与电子工程学院,广东,广州,510006 |
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| 基金项目： | 广州市属高校科技计划资助项目 |
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| 摘 要： | 运用自行设计的直接耦合石英管微波等离子体化学气相沉积（microwave plasma chemical vapor deposition，MPCVD）装置，以氢气和甲烷为反应气体，沉积出八个金刚石膜样品。研究了甲烷浓度对所沉积金刚石膜色度的影响。结果显示随着甲烷浓度的升高，饱和纯度和色纯度逐渐升高，甲烷浓度达到5．863％时，饱和纯度和色度纯度达到最大，分别为8．59／6和9．5％，之后随着CH4浓度的升高饱和纯度和色纯度开始下降。
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| 关 键 词： | 色度学 金刚石膜 饱和纯度 色度纯度 |
The influence of MPCVD diamond film chromaticity on concentration of methane |
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| DU Kang,XU Wei,HE Zhongxin,WU Zhiliang,PENG Jun.The influence of MPCVD diamond film chromaticity on concentration of methane[J].Optical Instruments,2009,31(4):88-92. |
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| Authors: | DU Kang XU Wei HE Zhongxin WU Zhiliang PENG Jun |
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| Affiliation: | (Institute of Physics and Electronic Engineering, Guangzhou University, Guangzhou 510006, China) |
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| Abstract: | By using the device of self-designed direct coupling quartz tube microwave plasma chemical vapor deposition(MPCVD),eight diamond thin films were deposited,utilizing hydrogen and methane as the reactant gases.The influence of MPCVD diamond film chromaticity on methane concentration was studied.It was shown that the saturated purity and chromaticity purity of diamond films increase with methane concentration increasing,when methane concentration was 5.863%,its arrive at their biggest values which was 8.5%and 9.5%,and then,its began to reduce with methane concentration increasing. |
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| Keywords: | colourometry diamond films saturated purity chromaticity purity |
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