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| 一种850nm单片集成光接收机前端 | |
| 引用本文： | 冯欧,冯忠,杨立杰,焦世龙,蒋幼泉,陈堂胜,李拂晓,叶玉堂.一种850nm单片集成光接收机前端[J].固体电子学研究与进展,2007,27(3):350-355. |
| 作者姓名： | 冯欧 冯忠 杨立杰 焦世龙 蒋幼泉 陈堂胜 李拂晓 叶玉堂 |
| 作者单位： | 1. 南京电子器件研究所GaAs工程中心,南京,210016 2. 单片集成电路与模块国家级重点实验室,南京,210016;电子科技大学光电信息学院,成都,610054 3. 单片集成电路与模块国家级重点实验室,南京,210016 4. 南京电子器件研究所GaAs工程中心,南京,210016;单片集成电路与模块国家级重点实验室,南京,210016 5. 电子科技大学光电信息学院,成都,610054 |
| 基金项目： | 国家自然科学基金 , 国家重点实验室基金 |
| 摘 要： | 采用0.5μm GaAs PHEMT工艺和台面光刻互连工艺研制了一种850nm光接收机前端单片电路,包括金属-半导体-金属光探测器和跨阻前置放大器。探测器光敏面积约2000μm2,电容小于0.15pF,4V偏压下的暗电流小于14nA。跨阻前置放大器-3dB带宽接近10GHz,跨阻增益约43dBΩ。光接收机前端在输入2.5Gb/s非归零伪随机二进制序列调制的850nm光信号下得到较为清晰的输出眼图。 |
| 关 键 词： | 金属-半导体-金属光探测器 跨阻前置放大器 光电集成电路 台面 眼图 |
| 文章编号： | 1000-3819（2007）03-350-06 |
| 修稿时间： | 2006-12-22 |
A Monolithically Integrated 850 nm Optical Receiver Front End |
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| FENG Ou,FENG Zhong,YANG Lijie,JIAO Shilong,JIANG Youquan,CHEN Tangsheng,LI Fuxiao,YE Yutang.A Monolithically Integrated 850 nm Optical Receiver Front End[J].Research & Progress of Solid State Electronics,2007,27(3):350-355. | |
| Authors: | FENG Ou FENG Zhong YANG Lijie JIAO Shilong JIANG Youquan CHEN Tangsheng LI Fuxiao YE Yutang |
| Affiliation: | 1. Nanjing Electronic Devices Institute, Nanjing , 210016, CHN; 2.National Key Laboratory of Monolithic Integrated Circuits and Modules, Nanjing, 210016, CHN; 3.School of Optoelectronic Inf. , Uni. of Electronic Science and Technology of China, Chengdu, 610054, CHN |
| Abstract: | An 850 nm monolithically integrated optical receiver front end has been developed with 0.5 μm GaAs PHEMT process, mesa process and interconnected photolithography technology between mesa and plane, which comprises a metal-semiconductor-metal (MSM) photodetector and a transimpedance preamplifier. The photodetector has a photosensitive area and a capacitance of 2000 μm2 and 0.15 pF respectively, as well as a dark current of less than 14 nA under a bias of 4 V. The transimpedance preamplifier has a -3 dB bandwidth close to 10 GHz, with a transimpedance of 43 dBΩ; The front end has a relatively clear output eye diagram for the 850 nm optical signd modulated by 2.5 Gb/s NRZ pseudorandom binary sequence. |
| Keywords: | metal-semiconductor-metal photodetector transimpedance preamplifier OEIC mesa eye diagram |
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