| 光谱共焦位移传感器测量透明材料厚度的应用 |
| |
| 引用本文： | 朱万彬,曹世豪. 光谱共焦位移传感器测量透明材料厚度的应用[J]. 光机电信息, 2011, 0(9): 50-53 |
| |
| 作者姓名： | 朱万彬 曹世豪 |
| |
| 作者单位： | 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室;长春理工大学; |
| |
| 摘 要： | 介绍了光谱共焦位移传感器的结构与原理,及其在测量厚度方面的应用,重点讨论了光谱共焦位移传感器用于测量透明材料平行平板厚度的可行性,对其产生的误差进行了详细的分析,并给出了相应的补偿方法.
|
| 关 键 词： | 光谱共焦 位移传感器 色散系数 |
Application of Confocal Chromatic Displacement Sensors to Measuring Thickness of Transparent Material |
| |
| ZHU Wan-bin,CAO Shi-hao. Application of Confocal Chromatic Displacement Sensors to Measuring Thickness of Transparent Material[J]. OME Information, 2011, 0(9): 50-53 |
| |
| Authors: | ZHU Wan-bin CAO Shi-hao |
| |
| Affiliation: | ZHU Wan-bin1,CAO Shi-hao2(1.State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China,2.Changchun University of Science and Technology,Changchun 130022,China) |
| |
| Abstract: | The structure and principle of the spectral confocal displacement sensor were described in this paper,and the application to measuring the thickness was analyzed.The paper focused on the feasibility of measuring the parallel plates made of transparent materials.The measurement errors were also analyzed,and the corresponding compensation ways were given. |
| |
| Keywords: | confocal chromatic displacement sensors dispersion coefficient |
| 本文献已被 CNKI 维普 等数据库收录！ |
|
