不同组分对PI／Al2O3复合薄膜的击穿性能和微观形貌的影响

为研究纳米填加剂(Al2O3)对PI复合薄膜击穿性能和微观形貌的影响,对0、5%、10%和20%4种不同质量分数的纳米Al2O3的PI/Al2O3复合薄膜击穿特性进行了测试,并借助扫描电镜对PI/Al2O3复合薄膜击穿孔区形貌进行特征分析,进一步利用积分法计算得到了击穿孔区的有效面积.结果表明:掺杂5%含量的Al2O3的PI复合薄膜击穿场强达到最佳.得出不同组分Al2O3的PI复合薄膜击穿孔有效面积的大小关系是:S20%＜S5%＜S10%＜S0.可见,引入纳米Al2O3颗粒可以使复合薄膜击穿孔的有效面积减小,说明掺杂纳米Al2O3对复合薄膜的击穿孔的有效面积大小是有显著影响的.

Breakdown Charaeteristics of PI/Al2O3 Hybrid Film with Different Content and Morphology Analysis of Breakdown Holes

The breakdown characteristics and micro-morphology of PI/Al2 O3 hybrid film with different content of Al2O3 were studied.The morphology around the breakdown holes was examined by means of a scanning electron microscope(SEM).The area of the breakdown holes was calculated by the integration method.The result shows that the breakdown strength of the films with 5% content of Al2 O3 is higher,and the relation between the effective area of the breakdown holes is: S20%< S5%< S10%< S0.It indicates that the effective area of the breakdown holes in the hybrid films with nano-particles added can be obviously reduced.