退火对CNx薄膜光学性质的影响

报道了退火对电子回旋共振(ECR)辅助脉)中激光溅射方法制备的CNx薄膜样品光学性质的影响，X射线衍射(XRD)结果显示CNx薄膜基本为无定形结构，但存在微量的多晶结构，拉曼散射谱显示所制备的CNx薄膜样品主要由C≡N、少量的C—C和微量的C≡N组成，随着退火温度的升高，拉曼散射谱不但在1357cm^-1附近出现了一个新峰(新峰对应无序的CN键)，而且C≡N和CN的相对含量比随着退火温度的提高大致呈先减小后增大再减小的趋势，从而证实在退火过程中部分N原子发生了迁移，椭偏仪所测量的CNx薄膜的光学常数表明退火温度对ε1、ε2、n、κ的大小和谱线的形状均产生了显著影响，结合拉曼散射谱可断定其原因为退火改变了CNx薄膜样品的内部结构和键结构，实验中得到的ε1、ε2、n、κ随光子能量的变化关系可用洛伦兹色散理论得到很好解释。

EFFECT OF ANNEALING ON OPTICAL PROPERTY OF CNx FILM

The effect of annealing on optical properties of the CN x films prepared by electron cyclotron resonance laser pulse assisted deposition was reported. X ray diffraction (XRD) shows that CN x film samples have basically amorphous structure and very little amount of poly crystalline structures. Raman Scattering spectra demonstrates that the bonds in CN x films prepared at room temperature (RT) are mainly CN bonds, but a few C-C and minim CN bonds. With the annealing temperature increasing,not only appears a new peak corresponding to disordered CN bond near 1357cm -1 in Raman Scattering spectra, but also the comparable accumulations between CN and C-N bonds roughly tend to decrease at first, then increase and then decrease again. It proves that partial hydrogen atoms in the samples are migrated or escaped from the samples. The optical constants of CN x film samples measured by scanning ellipsometry demonstrate that annealing has a pronounced effect on ε 1?ε 2?n?k and spectra shap