Polymeric optofluidic Fabry-Perot sensor by direct laser machining and hot embossing

We present a polymeric-based Fabry-Perot optofluidic sensor fabricated by combining direct laser machining and hot embossing. This technique provides a more elegant solution to conventional hot embossing by increasing the production rate, improving the reproducibility, and further reducing the cost, providing a large working area and flexibility in design modification and customization. As a proof of concept, a Fabry-Perot (F-P) optofluidic sensor was fabricated in polymethyl methacrylate (PMMA) from a micromachined stamp. The experimental results of the sensor agree well with analytical calculations and show a sensitivity of 2.13×10?3 RIU/nm for fluid refractive index change.