| 准分子激光对不锈钢表面的掺杂淀积 |
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| 引用本文： | 楼祺洪,辜红平,高鸿奕,魏运荣,董景星,丁爱臻. 准分子激光对不锈钢表面的掺杂淀积[J]. 应用激光, 1993, 0(3) |
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| 作者姓名： | 楼祺洪 辜红平 高鸿奕 魏运荣 董景星 丁爱臻 |
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| 作者单位： | 中国科学院上海光机所 201800 |
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| 摘 要： | 对用XcCl准分子激光束照射BCl_3气体包围下的不锈钢材料表面特性变化作了研究。紫外激光能成功地将硼掺入金属表面,最高掺杂浓度可达30％。
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| 关 键 词： | 准分子激光 不锈钢 掺杂淀积 |
Laser implant-deposition of stainless steel by excimer laser irradition |
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| Lou Qihong,Gu Hongping,Gao Hongyi,Wei Yunrong,Dong Jingxing,Ding Aizhen. Laser implant-deposition of stainless steel by excimer laser irradition[J]. Applied Laser, 1993, 0(3) |
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| Authors: | Lou Qihong Gu Hongping Gao Hongyi Wei Yunrong Dong Jingxing Ding Aizhen |
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| Affiliation: | Lou Qihong,Gu Hongping,Gao Hongyi,Wei Yunrong,Dong Jingxing,Ding Aizhen Shanghai Institute of Optics and Fine Mechanics Shanghai,201800 |
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| Abstract: | The process of doping and deposition of B atom into stainless steel by irradition of aXcCl excimer laser beam in a BCl_3 gas ambient is investigated, the exeperimental results show thatthe highest concentration of B atom in the surface layer exceeds 30 at. %. |
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| Keywords: | exeimer laser stainless steel implant-deposition |
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