Feasibility of multi-walled carbon nanotube probes in AFM anodization lithography |
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Authors: | Sun Choi Ji Bae Sukjong Jung Ahn Sang Hyun Kim Dal Young Jung Ki Han Cheolsu Choo Chung Chung Lee Haiwon |
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Affiliation: | Department of Chemistry, Hanyang University, Seoul 133-791, Korea. |
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Abstract: | Multi-walled carbon nanotube (CNT) tips were used in atomic force microscope (AFM) anodization lithography to investigate their advantages over conventional tips. The CNT tip required a larger threshold voltage than the mother silicon tip due to the Schottky barrier at the CNT-Si interface. Current-to-voltage curves distinguished the junction property between CNTs and mother tips. The CNT-platinum tip, which is more conductive than the CNT-silicon tip, showed promising results for AFM anodization lithography. Finally, the nanostructures with high aspect ratio were fabricated using a pulsed bias voltage technique as well as the CNT tip. |
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