| 基于MEMS工艺的光强调制型光纤氢传感器 |
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| 引用本文： | 周业成,陈吉安,张晓晶,邱显涛.基于MEMS工艺的光强调制型光纤氢传感器[J].仪表技术与传感器,2006(5):1-2,5. |
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| 作者姓名： | 周业成 陈吉安 张晓晶 邱显涛 |
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| 作者单位： | 上海交通大学微纳科学技术研究院,上海,200030 |
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| 摘 要： | 现有的氢传感器都是根据钯膜吸氢而产生膨胀的这个特点设计而成，但这些传感器基本上都存在着结构复杂、价格高、市场化比较困难、配套设备昂贵等特点。介绍一种基于MEMS工艺的光强调制型光纤传感器，说明该传感器的工作原理，并且给出了相关的制作工艺流程，最后对其测试性能进行了必要的探讨。证明了此类传感器不仪具有低成本、结构简单、适宜于批量生产等优点，而且在一定的测氢范围内具有相当良好的灵敏度和稳定性。
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| 关 键 词： | 光强调制 光纤氢传感器 |
| 文章编号： | 1002-1841（2006）05-01-02 |
| 收稿时间： | 2005-06-09 |
| 修稿时间： | 2005-06-092006-01-09 |
New Type of Light Intensity-modulated Optical Hydrogen Sensor Based on MEMS Technology |
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| ZHOU Ye-cheng,CHEN Ji-an,ZHANG Xiao-jing,QIU Xian-tao.New Type of Light Intensity-modulated Optical Hydrogen Sensor Based on MEMS Technology[J].Instrument Technique and Sensor,2006(5):1-2,5. |
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| Authors: | ZHOU Ye-cheng CHEN Ji-an ZHANG Xiao-jing QIU Xian-tao |
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| Affiliation: | Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University,Shanghai 200030, China |
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| Abstract: | The existing hydrogen sensors make use of the character that bulk of Pd film can expand after it absorbed hydrogen, but these sensors have some disadvantages, such as complex structure, high price, being difficult to be commercial and expensive correlated equipments,and report a new type of light intensity-modulated optical hydrogen sensor based on MEMS technology, and narrate the work principle and technical parameters of this optical hydrogen sensor, then discuss its performance. At last, can learn this type sensor possesses some traits, such as low cost, simple structure and so on, and can be prone to mass production, and proved this sensor possesses excellent sensitivity and good stability in some definite range of hydrogen concentration. |
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| Keywords: | MEMS |
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