| 时间监控双离子束溅射沉积制备荧光滤光片 |
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| 引用本文： | 卜轶坤,朝克夫,叶子青,郑权,钱龙生.时间监控双离子束溅射沉积制备荧光滤光片[J].激光与红外,2005,35(12):968-970. |
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| 作者姓名： | 卜轶坤 朝克夫 叶子青 郑权 钱龙生 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所,吉林,长春,130022;中国科学院研究生院,北京,100039;中国科学院长春光学精密机械与物理研究所,吉林,长春,130022 |
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| 基金项目： | 国家高技术研究发展计划（2002AA311141）资助项目. |
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| 摘 要： | 文章对中心波长为488nm、520nm、560nm和600nm的专用滤光片进行了研制，为保证通带高透过率的要求和对背景光的高效抑制，采用单基片进行膜系叠加的方法进行了组合带通滤光片的设计，并采用时间监控膜厚的双离子束溅射沉积薄膜技术进行了镀制，成功的制备出供生化仪使用的一系列荧光栅滤光片。
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| 关 键 词： | 荧光分析 栅滤光片 时间监控 双离子束溅射 |
| 文章编号： | 1001-5078（2005）12-0968-03 |
| 收稿时间： | 2005-05-19 |
| 修稿时间： | 2005-05-192005-06-27 |
Coating Fluorescence Filter by Time-power Monitoring of Double Ion Beam Sputtering |
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| BU Yi-kun,CHAO Ke-fu,YE Zi-qing,ZHENG Quan,QIAN Long-sheng.Coating Fluorescence Filter by Time-power Monitoring of Double Ion Beam Sputtering[J].Laser & Infrared,2005,35(12):968-970. |
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| Authors: | BU Yi-kun CHAO Ke-fu YE Zi-qing ZHENG Quan QIAN Long-sheng |
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| Affiliation: | 1. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130022, China; 2. Graduate School of the Chinese Academy of Sciences, Beijing 100039, China |
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| Abstract: | The filters for fluorescence spectra system were studied, which central wavelength is 488nm ,520nm ,560nm and 600nm respectively. To assure high transmittance in passband and restrain the background light, the combination bandpass filter coating with a single substrate was designed and coated by double ion beam sputter technique, which is controlled by a time-pewer monitoring method. |
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| Keywords: | fluorescence spectra barrier filter time-power monitoring double ion beam sputter |
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