| 晶体行为对SUS304钢表面溅射蚀刻圆锥状碳化物生成的影响 |
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| 引用本文： | 张清廉,王荣光,中佐啓治郎,加藤昌彦.晶体行为对SUS304钢表面溅射蚀刻圆锥状碳化物生成的影响[J].宝钢技术,2010(1):48-53. |
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| 作者姓名： | 张清廉 王荣光 中佐啓治郎 加藤昌彦 |
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| 作者单位： | 宝山钢铁股份有限公司,中国,上海,201900;广岛大学,日本,广岛,739-8527;广岛大学,日本,广岛,739-8527 |
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| 摘 要： | 研究用射频磁控溅射设备对SUS304钢表面进行600 W×14.4 ks或600 W×28.8ks的Ar+溅射蚀刻处理,并用SEM、SIM和EBSP对表面形貌进行微观表征。结果表明:600W溅射蚀刻功率下,圆锥状碳化物不仅沿晶界生成,而且在晶粒表面内大面积生成。其大小和分布密度在{111}面最大,依次按{110}面和{100}面的顺序递减,并于位错等晶体缺陷处优先成核生长。但是,随着时间的延长,晶体取向对碳化物的生长没有直接的影响,微细凸起物形成的碳化物层覆盖试验片,并在局部生成尖而细的凸起物。
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| 关 键 词： | 晶系 晶格缺陷 SUS304不锈钢 溅射蚀刻 圆锥状碳化物 |
Effect of Crystal Behavior on Deformation of Conical Carbides on Surface of SUS304 Stainless Steel by Sputter Etching |
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| ZHANG Qinglian,WANG Rongguang,NAKASA Keijiro , KATO Masahiko.Effect of Crystal Behavior on Deformation of Conical Carbides on Surface of SUS304 Stainless Steel by Sputter Etching[J].Baosteel Technology,2010(1):48-53. |
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| Authors: | ZHANG Qinglian WANG Rongguang NAKASA Keijiro KATO Masahiko |
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| Affiliation: | 1.Baoshan Iron & Steel Co.;Ltd.;Shanghai 201900;China;2.Hiroshima University;Higashi-Hiroshima 739-8527;Japan |
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| Abstract: | Samples of SUS304 stainless steel were sputter-etched by argon ions in the R.F.magnetron sputtering equipment with 600 W output power for 14.4 ks or 28.8 ks,and were observed by SEM,SIM and EBSP.The results show that conical carbides massively formed not only along the grain boundaries but also in the grains on sample's surfaces.The size and density distribution of the carbides are the biggest on the {111} surface and decrease from the {110} surface to the {100} surface by turns.Moreover,the carbides formed... |
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| Keywords: | crystal system crystal defect SUS304 stainless steel sputter etching conical carbide |
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