| Abstract: | This article describes the fabrication of a microelectromechanical system (MEMS) mirror array and mirror‐drive electrodes with high‐aspect‐ratio gold walls that reduce electrical interference in a wavelength‐selective switch (WSS). The MEMS mirror array, in which a lot of closely spaced adjacent mirrors are electrostatically operated, can be fabricated with a high yield by encapsulating the mirrors with an organic film that protects them from process damage. The gold walls with a high‐aspect ratio are formed in the narrow space between adjacent mirror‐drive electrodes by using thick‐multilevel interconnection technology. Because of these walls between adjacent electrodes, each MEMS mirror operates with low electrical interference. © 2011 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc. |
